DocumentCode

316473

Title

Modifying CVD diamond films for FED´s

Author

Habermann, Thomas ; Gohl, A. ; Nau, Dana ; Wedel, M. ; Muller, Gunter

Author_Institution

Fachbereich Physik, Bergische Universitaet Wuppertal

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

156

Lastpage

160

Keywords

Cathodes; Current density; Fabrication; Flat panel displays; Iron; Plasma temperature; Scanning electron microscopy; Semiconductor films; Substrates; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

conf

DOI

10.1109/IVMC.1997.627408

Filename

627408