A Insitu Vacuum Encapsulated Novel Lateral Field Emitter Triode for Microwave Application

Author

Park, Clieol-Miii ; Moo-Sup Lim ; Han, Mia-Koo ; Choi, Aiid Yearn-Ik

Author_Institution

Seoul National University

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

176

Lastpage

180

Keywords

Anodes; Cathodes; Etching; Fabrication; Oxidation; Plasma applications; Stability; Titanium; Transconductance; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

DOI

10.1109/IVMC.1997.627412

Filename

627412

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