Experimental analysis of design options for spiral inductors integrated on low cost MCM-D substrates

This paper presents the results of investigations on integrated inductors for a new low cost MCM-D substrate technology. The results are focused on the analysis of design options and design parameter for planar spiral inductors. Measurements on test structures were used to quantify process tolerances and inductor performance and to set up accurate models for EM-simulations. Simulation results of many different inductor configurations and layouts were compared in terms of inductance L, quality factor Q and area A. The goal was to give a better understanding of inductor behavior to geometry changes and to offer inductor design guidelines for RF system designers. Special attention was given to inductor cost, driven by area consumption