DocumentCode
316491
Title
Fabrication and Electrical Properties of Random Addressable 100x100 Matrix of Field-Emission Cathodes
Author
Chubun, N.N. ; Djubua, B.C.
Author_Institution
SRPC Istok, Fryazino, Moscow
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
249
Lastpage
250
Abstract
Addressable matrix with capacity 100x1 00 of field-emission array cathodes on silicon substrate was fabricated and investigated. Each cathode consist ofj-om 1 to 36 emission cells and suitable for a high resolution FED as well as multi e-beam devices.
Keywords
Annealing; Cathodes; Dielectric substrates; Diodes; Fabrication; Lithography; Oxidation; P-n junctions; Silicon compounds; Transmission line matrix methods;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627522
Filename
627522
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