• DocumentCode
    316498
  • Title

    Effect of N doping on the electron emission properties of DLC Film on 2-inch Mo FEAs panel

  • Author

    Jung, Jae Hoon ; Ju, Byeong Kwon ; Kim, Hoon ; Oh, Myung Hwan ; Chung, Suk Jae ; Jang, Jin

  • Author_Institution
    Electronic Materials and Devices Research Center, KIST Seoul
  • fYear
    1997
  • fDate
    17-21 Aug. 1997
  • Firstpage
    276
  • Lastpage
    280
  • Keywords
    Anodes; Bonding; Cathodes; Coatings; Doping; Electron emission; Organic materials; Plasma chemistry; Plasma properties; Plasma temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
  • Conference_Location
    Kyongju, Korea
  • Print_ISBN
    0-7803-3786-7
  • Type

    conf

  • DOI
    10.1109/IVMC.1997.627558
  • Filename
    627558
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=316498