DocumentCode
316502
Title
Mechanisms of Field Emission from Diamond Films
Author
Huang, Qing-An ; Qin, Ming ; Zhang, Bing ; Sin, Johnny K O
Author_Institution
Microelectronics Center, Southeast University
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
300
Lastpage
304
Keywords
Electron emission; Microelectronics; Semiconductor device doping; Semiconductor films; Semiconductor process modeling; Silicon; Solid state circuits; Substrates; Thermal conductivity; Vacuum breakdown;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627570
Filename
627570
Link To Document