Title :
Expert System For Test Structure Data Interpretation
Author :
Montijn-Dorgelo, Fiona N H ; Horst, Herman J ter
Author_Institution :
Philips Research Laboratories Eindhoven
Keywords :
Control charts; Data analysis; Diagnostic expert systems; Expert systems; MOS devices; Performance evaluation; Phase change materials; Production; Prototypes; System testing;
Conference_Titel :
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location :
Long Beach, CA, USA
DOI :
10.1109/ICMTS.1988.672955