DocumentCode :
3165117
Title :
Expert System For Test Structure Data Interpretation
Author :
Montijn-Dorgelo, Fiona N H ; Horst, Herman J ter
Author_Institution :
Philips Research Laboratories Eindhoven
fYear :
1988
fDate :
22-23 Feb. 1988
Firstpage :
169
Lastpage :
173
Keywords :
Control charts; Data analysis; Diagnostic expert systems; Expert systems; MOS devices; Performance evaluation; Phase change materials; Production; Prototypes; System testing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location :
Long Beach, CA, USA
Type :
conf
DOI :
10.1109/ICMTS.1988.672955
Filename :
672955
Link To Document :
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