DocumentCode :
316516
Title :
Electron emission from gated silicide field emitter arrays
Author :
Takai, M. ; Iriguchi, T. ; Morimoto, H. ; Hosono, A. ; Kawabuchi, S.
Author_Institution :
Osaka University
fYear :
1997
fDate :
17-21 Aug. 1997
Firstpage :
367
Lastpage :
370
Keywords :
Annealing; Atomic measurements; Coatings; Electron emission; Field emitter arrays; Materials science and technology; Niobium; Research and development; Silicidation; Silicides;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
Type :
conf
DOI :
10.1109/IVMC.1997.627597
Filename :
627597
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=316516
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