Title :
Fabrication of DLC-Coated Field Emitter Triode Using Aluminum Parting Layer
Author :
Sanjo Lee ; Sunup Lee ; Jeon, D. ; Lee, Sunup ; Ju, Byeong Kwon ; Oh, Myung Hwan
Author_Institution :
Myong Ji Univesity, Department of Physics
Keywords :
Aluminum; Argon; Coatings; Fabrication; Insulation; Leakage current; Semiconductor thin films; Silicon; Substrates; Thermal conductivity;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627600
