DocumentCode :
316521
Title :
Field Electron Emission From Silicon Tip Arrays Coated With Nitrogen Doped DLC Films.
Author :
Litovchenko, V.G. ; Evtukh, A.A. ; Klyui, N.I. ; Kudzinovski, S.Yu. ; Marchenko, R.I. ; Semenovich, V.A.
Author_Institution :
Institute of Semiconductor Physics
fYear :
1997
fDate :
17-21 Aug. 1997
Firstpage :
390
Lastpage :
395
Keywords :
Chemicals; Conductive films; Diamond-like carbon; Electron emission; Nitrogen; Oxidation; Semiconductor films; Silicon; Thermal conductivity; Voltage;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
Type :
conf
DOI :
10.1109/IVMC.1997.627602
Filename :
627602
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=316521
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