DocumentCode

316522

Title

Porous silicon field emission arrays with built-in spacer

Author

Kim, H.R. ; Jessing, J.R. ; Parker, D.L.

Author_Institution

Institute for Solid State Electronics Department of Electrical Engineering, Texas A&M University

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

396

Lastpage

400

Keywords

Chemicals; Electric variables; Etching; Fabrication; Low voltage; Rough surfaces; Semiconductor thin films; Silicon; Substrates; Surface roughness;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

conf

DOI

10.1109/IVMC.1997.627603

Filename

627603