DocumentCode :
316523
Title :
Simulation And Fabrication Of Spindt Type Field Emitter Arrays
fYear :
1997
fDate :
17-21 Aug. 1997
Firstpage :
401
Lastpage :
406
Keywords :
Clouds; Electron beams; Field emitter arrays; Geometrical optics; Holographic optical components; Holography; Lithography; Optical device fabrication; Optical films; Stress;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
Type :
conf
DOI :
10.1109/IVMC.1997.627605
Filename :
627605
Link To Document :
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