Title :
Resonant Fowler-Nordheim tunneling emission from metal-oxide-semiconductor cathodes
Author :
Mimura, H. ; Abe, Y. ; Ikeda, J. ; Tahara, K. ; Neo, Y. ; Shimawaki, H. ; Yokoo, K.
Author_Institution :
Research Institute of Electrical Communication, Tohoku University
Keywords :
Atomic layer deposition; Cathodes; Coherence; Electrodes; Electron beams; Electron emission; Elementary particle vacuum; Research and development; Resonance; Resonant tunneling devices;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627610