DocumentCode :
316528
Title :
Novel Metal Field Emitter Structure for Low Voltage Operation
Author :
Oh, Chang Woo ; Lee, Chun Gyoo ; Lee, Jong Duk ; Park, Byung Gook ; Lee, Jong Ho
Author_Institution :
Inter-University Semiconductor Research Center (ISRC), Seoul National University
fYear :
1997
fDate :
17-21 Aug. 1997
Firstpage :
426
Lastpage :
430
Keywords :
Anodes; Apertures; Etching; Fabrication; Field emitter arrays; Lithography; Low voltage; Oxidation; Silicon; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
Type :
conf
DOI :
10.1109/IVMC.1997.627611
Filename :
627611
Link To Document :
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