DocumentCode

316528

Title

Novel Metal Field Emitter Structure for Low Voltage Operation

Author

Oh, Chang Woo ; Lee, Chun Gyoo ; Lee, Jong Duk ; Park, Byung Gook ; Lee, Jong Ho

Author_Institution

Inter-University Semiconductor Research Center (ISRC), Seoul National University

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

426

Lastpage

430

Keywords

Anodes; Apertures; Etching; Fabrication; Field emitter arrays; Lithography; Low voltage; Oxidation; Silicon; Substrates;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

conf

DOI

10.1109/IVMC.1997.627611

Filename

627611