Title :
Novel Metal Field Emitter Structure for Low Voltage Operation
Author :
Oh, Chang Woo ; Lee, Chun Gyoo ; Lee, Jong Duk ; Park, Byung Gook ; Lee, Jong Ho
Author_Institution :
Inter-University Semiconductor Research Center (ISRC), Seoul National University
Keywords :
Anodes; Apertures; Etching; Fabrication; Field emitter arrays; Lithography; Low voltage; Oxidation; Silicon; Substrates;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627611
