DocumentCode :
316530
Title :
Fabrication And Characterization Of Laser Produced Silicon Field Emission Arrays
Author :
Evtukh, A.A. ; Kaganovich, E.B. ; Litovchenko, V.G. ; Marchenko, R.I. ; Manoilov, E.G. ; Svechnikov, S.V.
Author_Institution :
Institute of Semiconductor Physics
fYear :
1997
fDate :
17-21 Aug. 1997
Firstpage :
436
Lastpage :
439
Keywords :
Etching; Gas lasers; Lithography; Optical arrays; Optical device fabrication; Optical pulses; Pulsed laser deposition; Semiconductor laser arrays; Silicon; Surface emitting lasers;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
Type :
conf
DOI :
10.1109/IVMC.1997.627614
Filename :
627614
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=316530
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