DocumentCode
316530
Title
Fabrication And Characterization Of Laser Produced Silicon Field Emission Arrays
Author
Evtukh, A.A. ; Kaganovich, E.B. ; Litovchenko, V.G. ; Marchenko, R.I. ; Manoilov, E.G. ; Svechnikov, S.V.
Author_Institution
Institute of Semiconductor Physics
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
436
Lastpage
439
Keywords
Etching; Gas lasers; Lithography; Optical arrays; Optical device fabrication; Optical pulses; Pulsed laser deposition; Semiconductor laser arrays; Silicon; Surface emitting lasers;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627614
Filename
627614
Link To Document