• DocumentCode
    316534
  • Title

    Reproducibly Sharpened Pyramidal Diamond Field Emitter Arrays

  • Author

    Sakuma, Naoshi ; Ono, Tomio ; Sakai, Tadashi

  • Author_Institution
    Advanced Semiconductor Devices Research Lab., Toshiba Corporation
  • fYear
    1997
  • fDate
    17-21 Aug. 1997
  • Firstpage
    451
  • Lastpage
    454
  • Keywords
    Electron emission; Fabrication; Field emitter arrays; Glass; Oxidation; Scanning electron microscopy; Shape; Substrates; Surface morphology; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
  • Conference_Location
    Kyongju, Korea
  • Print_ISBN
    0-7803-3786-7
  • Type

    conf

  • DOI
    10.1109/IVMC.1997.627620
  • Filename
    627620
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=316534