Title :
Reproducibly Sharpened Pyramidal Diamond Field Emitter Arrays
Author :
Sakuma, Naoshi ; Ono, Tomio ; Sakai, Tadashi
Author_Institution :
Advanced Semiconductor Devices Research Lab., Toshiba Corporation
Keywords :
Electron emission; Fabrication; Field emitter arrays; Glass; Oxidation; Scanning electron microscopy; Shape; Substrates; Surface morphology; Temperature;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627620