Title :
Interpretation of capacitance-voltage curves for process fault diagnosis: a machine-learning expert system approach
Author :
Walls, J.A. ; Walton, A.J. ; Robertson, J.M. ; Crawford, T.M.
Author_Institution :
University of Edinburgh
Keywords :
Capacitance-voltage characteristics; Data mining; Density measurement; Diagnostic expert systems; Doping profiles; Fault diagnosis; Implants; Marine vehicles; Multilevel systems; Shape;
Conference_Titel :
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location :
Long Beach, CA, USA
DOI :
10.1109/ICMTS.1988.672956
