DocumentCode
316536
Title
Stability of Field Emission Current for Tetrahedral Amorphous Carbon Films Prepared by Filtered Vacuum Arc Deposition
Author
Chung, Suk Jae ; Han, Eun Jung ; Moon, Jong Hyun ; Chen, Zhi Ying ; Liu, X. ; Jang, Jin
Author_Institution
Dept. of Physics, Kyung Hee Univ.
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
460
Lastpage
464
Keywords
Amorphous materials; Bonding; Carbon dioxide; Electron emission; Fluctuations; Plasma measurements; Stability; Stress; Thermal conductivity; Vacuum arcs;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627623
Filename
627623
Link To Document