Title :
Characterization of Diamond-Like Carbon Films Prepared by Plasma Enhanced Chemical Vapor Deposition with Vertical-capacitor Electrodes
Author :
Lee, Kwang Bae ; Rhee, Byung Roh ; Kim, Chong Tak ; Jang, Jin
Author_Institution :
Department of Physics, Sangji University
Keywords :
Cathodes; Chemical vapor deposition; Diamond-like carbon; Electrodes; Hydrogen; Optical films; Plasma chemistry; Plasma measurements; Stimulated emission; Voltage;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627625
