DocumentCode

316547

Title

Electron emission characteristics of polycrystalline diamond films

Author

Sugino, Takashi ; Kawasaki, Seiji ; Yokota, Yuuko ; Iwasaki, Yukio ; Shirafuji, Junji

Author_Institution

Department of Electrical Engineering, Osaka University

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

513

Lastpage

517

Keywords

Annealing; Contacts; Electron emission; Gold; Hydrogen; Impurities; Plasma properties; Semiconductor films; Substrates; Surface treatment;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

conf

DOI

10.1109/IVMC.1997.627637

Filename

627637