DocumentCode

316557

Title

Fabrication of Gated Diamond Emitter Array

Author

Hunsuk Cho ; Young-Joon Baik

Author_Institution

Korea Institute of Science and Technology, Division of Ceramics

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

561

Lastpage

563

Keywords

Ceramics; Etching; Fabrication; Field emitter arrays; Microelectronics; Physics; Semiconductor films; Silicon; Transistors; Very large scale integration;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

conf

DOI

10.1109/IVMC.1997.627649

Filename

627649