DocumentCode
316559
Title
Micropattern Gated Diamond Field Emitter Array
Author
Kang, W.P. ; Wisitsora-at, A. ; Davidson, J.L. ; Howell, M. ; Li, Q. ; Xu, J.F. ; Kerns, D.V.
Author_Institution
Vanderbilt University
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
567
Lastpage
571
Keywords
Bonding; Chemical vapor deposition; Conducting materials; Crystalline materials; Dielectric substrates; Etching; Field emitter arrays; Low voltage; Silicon; Thermal conductivity;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627651
Filename
627651
Link To Document