Title :
Integration of High Voltage LDMOSFETs into a Low Voltage CMOS Technology for Display´s Driving Circuit Applications
Author :
Ki, J.D. ; Park, M.Y. ; Kang, J.Y. ; Lee, S.Y. ; Koo, J.G. ; Cho, K.I. ; Nam, K.S.
Author_Institution :
Semiconductor Division, Electronics and Telecommunications Research Institute
Keywords :
CMOS process; CMOS technology; Costs; Low voltage; MOSFETs; Manufacturing processes; Plasma displays; Power integrated circuits; Silicon; Substrates;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627652
