DocumentCode

316568

Title

Fabrication of Gated Field Emitter Arrays with Self-Align Lateral Resistors

Author

Karpov, L.D. ; Genelev, A.P. ; Drach, V.A. ; Zasemkov, V.S.

Author_Institution

KGTU/VITIM

fYear

1997

fDate

17-21 Aug. 1997

Firstpage

613

Lastpage

616

Keywords

Cathodes; Chromium; Etching; Fabrication; Field emitter arrays; Lithography; Resistors; Resists; Silicon carbide; Sputtering;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International

Conference_Location

Kyongju, Korea

Print_ISBN

0-7803-3786-7

Type

conf

DOI

10.1109/IVMC.1997.627661

Filename

627661