Title :
Anodic Alumina: A Promising Constructional Material For Vacuum And Semiconductor Microelectronics
Author :
Mukhurov, N.I. ; Efremov, G.I. ; Kotova, I.F.
Author_Institution :
Institute of Electronics, Belarus A cademy of Sciences, Minsk, Republic of Belarus
Keywords :
Aluminum; Amorphous materials; Building materials; Ceramics; Glass; Microelectronics; Microwave devices; Semiconductor materials; Substrates; Temperature;
Conference_Titel :
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location :
Kyongju, Korea
Print_ISBN :
0-7803-3786-7
DOI :
10.1109/IVMC.1997.627662
