DocumentCode
316576
Title
Vacuum Microelectronic Pressure Sensor with Novel Cathode
Author
Xia, S.H. ; Liu, J. ; Chen, S.F. ; Han, J.H. ; Cui, D.F.
Author_Institution
State Key Laboratories of Transducer Technology
fYear
1997
fDate
17-21 Aug. 1997
Firstpage
648
Lastpage
652
Keywords
Acoustic sensors; Anodes; Cathodes; Computer simulation; Microelectronics; Semiconductor films; Sensor arrays; Sensor phenomena and characterization; Temperature sensors; Voltage;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
Conference_Location
Kyongju, Korea
Print_ISBN
0-7803-3786-7
Type
conf
DOI
10.1109/IVMC.1997.627669
Filename
627669
Link To Document