• DocumentCode
    316599
  • Title

    Fabrication of Transfer Mold Field Emitter Array in Hig,h Emitter Density

  • Author

    Hasegawa, Toshimichi ; Fukuda, Katsuyoshi ; Nakamoto, Masakazu

  • Author_Institution
    Materials & Devices Research Labs, Research & Development Center, Toshiba Corporation
  • fYear
    1997
  • fDate
    17-21 Aug. 1997
  • Firstpage
    763
  • Lastpage
    767
  • Keywords
    Anisotropic magnetoresistance; Breakdown voltage; Etching; Fabrication; Field emitter arrays; Insulation; Low voltage; Microelectronics; Shape; Vacuum technology;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Microelectronics Conference, 1997. Technical Digest., 1997 10th International
  • Conference_Location
    Kyongju, Korea
  • Print_ISBN
    0-7803-3786-7
  • Type

    conf

  • DOI
    10.1109/IVMC.1997.627693
  • Filename
    627693
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=316599