Title :
Automatic test structure modification
Author :
Golshan, Khosrow ; Shetti, S. S Mahant ; Howard, Michael
Author_Institution :
Texas Instruments Incorporated
Keywords :
Automatic testing; Character generation; Circuit testing; Data analysis; Documentation; Equations; Fabrication; Geometry; Integrated circuit testing; System testing;
Conference_Titel :
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location :
Long Beach, CA, USA
DOI :
10.1109/ICMTS.1988.672959
