DocumentCode :
3166739
Title :
A Test Structure To Measure The misalignment between Poly-si And Diffusion layers
Author :
Jian, Mi
Author_Institution :
Tianjin Univ.
fYear :
1988
fDate :
22-23 Feb. 1988
Firstpage :
204
Lastpage :
206
Keywords :
Area measurement; Bridge circuits; Circuit testing; Integrated circuit measurements; Integrated circuit technology; Lithography; MOSFET circuits; Microelectronics; Semiconductor device measurement; Silicon;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location :
Long Beach, CA, USA
Type :
conf
DOI :
10.1109/ICMTS.1988.672962
Filename :
672962
Link To Document :
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