Title :
A Test Structure To Measure The misalignment between Poly-si And Diffusion layers
Author_Institution :
Tianjin Univ.
Keywords :
Area measurement; Bridge circuits; Circuit testing; Integrated circuit measurements; Integrated circuit technology; Lithography; MOSFET circuits; Microelectronics; Semiconductor device measurement; Silicon;
Conference_Titel :
Microelectronic Test Structures, 1988. ICMTS. Proceedings of the 1988 IEEE International Conference on
Conference_Location :
Long Beach, CA, USA
DOI :
10.1109/ICMTS.1988.672962
