Title :
Fabrication of 3-dimensional structure MOSFET embodied in the convex corner of the silicon microfluidic channel
Author :
Geunbae Lim ; Chin-Sung Park ; Hong-Kun Lyu ; Dong-Sun Kim ; Yong-Taek Jeong ; Hey-Jung Park ; Hyoung Sik Kim ; Jang-Kyoo Shin ; Pyung Choi ; Jong-Hyun Lee
Author_Institution :
Bio-chip Project Team, Samsung Adv. Inst. of Technol., Suwon, South Korea
Abstract :
The purpose of this work is to develop a new 3-dimensional structure MOSFET embodied in the convex corner of the silicon microfluidic channel (/spl mu/channel). In this paper, we will present the fabrication process and the electrical characteristics of the 3-dimensional structure MOSFET which will be useful for biochemical detection.
Keywords :
MOSFET; biosensors; microfluidics; semiconductor device measurement; silicon; 3-dimensional structure MOSFET; Si; biochemical detection; electrical characteristics; fabrication process; silicon microfluidic channel; Anisotropic magnetoresistance; Chemical analysis; Electrodes; Etching; Fabrication; Lithography; MOSFET circuits; Microfluidics; Oxidation; Silicon;
Conference_Titel :
Microprocesses and Nanotechnology Conference, 2002. Digest of Papers. Microprocesses and Nanotechnology 2002. 2002 International
Conference_Location :
Tokyo, Japan
Print_ISBN :
4-89114-031-3
DOI :
10.1109/IMNC.2002.1178679
