Investigation of On-Wafer TRL Calibration Accuracy Dependence on Transitions and Probe Positioning

Author

Atasoy, H.I. ; Unlu, M. ; Topalli, K. ; Istanbulluoglu, I. ; Temocin, E.U. ; Bayraktar, O. ; Demir, S. ; Civi, O. ; Koc, S. ; Akin, T.

Author_Institution

Dept. of Electr.-Electron. Eng., Middle East Tech. Univ., Ankara

fYear

2006

fDate

10-15 Sept. 2006

Firstpage

1582

Lastpage

1585

Abstract

This paper presents the effects of various transition types from the measurement plane to the reference plane in TRL calibration and probe positioning effects for on wafer measurements of CPW based devices. Fourteen different transition types, with direct, linear and exponential transitions, including 3 different variations of ground-signal-ground (GSG) spacing are examined. To observe the performance of the transitions, simple CPW transmission lines of different characteristic impedances are fabricated using standard lithography techniques on glass substrate and S-parameters are measured in 4.5-20 GHz band. Results are compared with electromagnetic simulations. The effects of probe misplacement along the lateral and horizontal axis are also investigated

Keywords

S-parameters; calibration; coplanar transmission lines; coplanar waveguide components; waveguide transitions; 4.5 to 20 GHz; CPW based devices; CPW transmission lines; S-parameters; electromagnetic simulations; glass substrate; ground-signal-ground spacing; on-wafer TRL calibration accuracy dependence; probe positioning; standard lithography techniques; Calibration; Coplanar waveguides; Glass; Impedance; Lithography; Measurement standards; Position measurement; Probes; Scattering parameters; Transmission line measurements; Calibration; TRL; coplanar waveguide; transmission line transitions;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference, 2006. 36th European

Conference_Location

Manchester

Print_ISBN

2-9600551-6-0

Type

conf

DOI

10.1109/EUMC.2006.281401

Filename

4058146