Title :
Session #5 SOI photonics, MEMS, sensors, and circuits
Author :
Hiramoto, Toshiro ; Kim, Dong-Won
Author_Institution :
University of Tokyo, Japan
Keywords :
Biosensors; Circuits; DNA; Gas detectors; Micromechanical devices; Micromirrors; Optical design; Optical device fabrication; Optical sensors; Optoelectronic and photonic sensors;
Conference_Titel :
SOI Conference, 2008. SOI. IEEE International
Conference_Location :
New Paltz, NY
Print_ISBN :
978-1-4244-1954-8
Electronic_ISBN :
1078-621X
DOI :
10.1109/SOI.2008.4656305
