• DocumentCode
    3167538
  • Title

    Design and fabrication of SOI-based micromirror for laser raster scanning display

  • Author

    Wenjing, Liu ; Yongming, Tang ; Baoping, Wang

  • Author_Institution
    Sch. of Electron. Sci. & Eng., Southeast Univ., Nanjing
  • fYear
    2008
  • fDate
    6-9 Oct. 2008
  • Firstpage
    89
  • Lastpage
    90
  • Abstract
    In this paper, the design and fabrication of Silicon-On-Insulator scanning micromirrors that have high angular precision over a large scan angle is described. These microscanners are actuated by electrostatic comb drives, which consume minimum amounts of power. When driven by AC signals, these scanners have fast scan rates and large scan angles.
  • Keywords
    microdisplays; micromirrors; optical design techniques; optical fabrication; optical scanners; silicon-on-insulator; AC signal; SOI-based micromirror; Si-SiO2; electrostatic comb drive; laser raster scanning display; silicon-on-insulator fabrication; Chromium; Displays; Electrodes; Electrostatics; Glass; Gold; Micromirrors; Optical design; Optical device fabrication; Resonant frequency;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    SOI Conference, 2008. SOI. IEEE International
  • Conference_Location
    New Paltz, NY
  • ISSN
    1078-621X
  • Print_ISBN
    978-1-4244-1954-8
  • Electronic_ISBN
    1078-621X
  • Type

    conf

  • DOI
    10.1109/SOI.2008.4656308
  • Filename
    4656308
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3167538