Title :
Data optimization in semiconductor manufacturing
Author :
Acree, David A. ; Matsubara, Kenji
Author_Institution :
Fujitsu AMD Semicond. Ltd., Fukushima, Japan
Abstract :
In today´s fast paced world of automation and computers, collection of data is easier than ever. Unfortunately, data collection ease can frequently produce more data than is actually needed for good decision making. This proliferation of data collection can actually impede manufacturing efficiency. Data can be optimized in the sense that less data can be collected while actually getting better information. This paper gives an approach that was applied in reducing data collection in a modern semiconductor fab operation that was still ramping production. While data was reduced, information for decision making was improved. The approach is detailed step by step. A brief example of actual optimization activity is described
Keywords :
management; manufacturing data processing; optimisation; semiconductor device manufacture; data optimization; decision making; management; semiconductor manufacturing; Computer aided manufacturing; Data mining; Databases; Guidelines; Impedance; Manufacturing automation; Personnel; Sampling methods; Semiconductor device manufacture; Testing;
Conference_Titel :
Statistical Metrology, 1997 2nd International Workshop on
Conference_Location :
Kyoto
Print_ISBN :
0-7803-3737-9
DOI :
10.1109/IWSTM.1997.629428