DC to radio-frequency characterization of ZrO2 dielectric for “Metal-Insulator-Metal” integrated capacitors

This paper deals with the electrical and wideband frequency characterizations of Metal-Insulator-Metal capacitors integrating medium-k material ZrO₂. Characterizations are performed from DC up to 4 GHz on micro-strip waveguides structures. We investigate electrical performance of MIM capacitors which integrate thicknesses of 45 nm to 10 nm of ZrO₂ dielectric layer. In particular, this paper focuses on the frequency effect on the voltage linearity of these capacitors. The dependence of the Voltage Capacitance Coefficient ¿ is underlined from 1 kHz to 1 GHz.