Title :
Semiconductor ring lasers fabricated with UV laser-assisted cryo-etching
Author :
Tsai, Chia-Ho ; Lee, Chun-Hao ; Chiang, Hsin-Jiun ; Yang, C.C. ; Shih, M.C. ; Chen, B.C. ; Chuang, T.J.
Author_Institution :
Dept. of Electr. Eng., Nat. Taiwan Univ., Taipei, Taiwan
Abstract :
Semiconductor circular ring lasers have attracted quite much attention because of the higher side-mode suppression ratio and the versatility of integration with other components. In order to reduce the scattering loss in the curved waveguide of such a ring laser, the etched wall of the waveguide ridge must be highly vertical and smooth. In this paper, we present the results of our GaAs-AlGaAs quantum well circular ring lasers which were etched with the UV laser-assisted cryo-etching technique
Keywords :
III-V semiconductors; aluminium compounds; cryogenics; etching; gallium arsenide; laser modes; light scattering; optical fabrication; optical losses; quantum well lasers; ridge waveguides; ring lasers; waveguide lasers; GaAs-AlGaAs; GaAs-AlGaAs quantum well circular ring lasers; UV laser-assisted cryo-etching; UV laser-assisted cryo-etching technique; curved waveguide; etched wall; scattering loss; semiconductor circular ring lasers; semiconductor ring laser fabrication; side-mode suppression ratio; waveguide ridge; Dry etching; Laser theory; Lasers and electrooptics; Lighting; Quantum well lasers; Ring lasers; Semiconductor lasers; Semiconductor waveguides; Vertical cavity surface emitting lasers; Waveguide lasers;
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1997. LEOS '97 10th Annual Meeting. Conference Proceedings., IEEE
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-3895-2
DOI :
10.1109/LEOS.1997.630489
