Title :
Liquid metal droplets for RF MEMS switches
Author :
Chen, Chung-Hao ; Peroulis, Dimitrios
Author_Institution :
Sch. of Electr. & Comput. Eng., Purdue Univ., West Lafayette, IN, USA
Abstract :
This paper discusses the design, fabrication and characterization of microstructures for the manipulation of very small liquid-metal droplets. In particular we demonstrate the successful actuation of 50-μm liquid-metal droplets with an actuation voltage of less than 70V. Liquid contacts have the potential of increased power handling, which renders these structures good candidates for reliable high-power MEMS switches.
Keywords :
liquid metals; microswitches; microwave switches; 50 micron; RF MEMS switches; electrostatic actuation; liquid contacts; liquid metal droplets; Coplanar waveguides; Electrodes; Hysteresis; Microswitches; Radio frequency; Radiofrequency microelectromechanical systems; Rough surfaces; Surface roughness; Switches; Voltage;
Conference_Titel :
Silicon Monolithic Integrated Circuits in RF Systems, 2006. Digest of Papers. 2006 Topical Meeting on
Print_ISBN :
0-7803-9472-0
DOI :
10.1109/SMIC.2005.1587895
