Title :
The Love wave sensor based on network analyzer
Author :
Haifeng, Pan ; Huizhong Zhu ; Guanping, Feng
Author_Institution :
Dept. of Precision Instruments & Mechanology, Tsinghua Univ., Beijing, China
fDate :
29 June-1 July 2002
Abstract :
The Love wave is one type of surface acoustic wave (SAW). It is a guided acoustic mode propagating in a thin layer deposited on a substrate. Due to the advantages of high mass sensitivity, low noise level and suitability for operating in liquids, Love wave sensors have become one of the hot spots in current research of biosensors. In this paper, Love wave devices with ST-cut quartz substrates and different thickness guiding layers of fused quartz were fabricated. The Love wave sensor based on a network analyzer was constructed and the fundamental parameters of Love wave devices in gas phase and liquid phase were measured successfully.
Keywords :
Love waves; biosensors; network analysers; quartz; surface acoustic wave sensors; Love wave sensor; SAW; ST-cut quartz substrate; SiO2; biosensor; fused quartz guiding layers; gas phase parameters; guided acoustic mode propagation; insertion loss; liquid operating environment; liquid phase parameters; mass sensitivity; network analyzer; noise level; surface acoustic waves; Acoustic devices; Acoustic propagation; Acoustic sensors; Acoustic waves; Biosensors; Gas detectors; Liquids; Noise level; Phase measurement; Surface acoustic waves;
Conference_Titel :
Communications, Circuits and Systems and West Sino Expositions, IEEE 2002 International Conference on
Print_ISBN :
0-7803-7547-5
DOI :
10.1109/ICCCAS.2002.1179119
