Self-assembled micro-XYZ stages for optical scanning and alignment

Author

Fan, Li ; Lee, Shi-Sheng ; Wu, Ming C.

Author_Institution

Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA

Volume

1

fYear

1997

fDate

10-13 Nov 1997

Firstpage

266

Abstract

Summary form only given. In summary, a fully actuated micro-XYZ stage with bi-directional scratch drive actuator array has been demonstrated for the first time. This fabrication process of this micro-XYZ is fully compatible with the free-space micro-optical bench technology. This allows high performance free-space optical systems to be monolithically integrated on a chip

Keywords

actuators; arrays; integrated optoelectronics; micromechanical devices; optical fabrication; optical scanners; position control; actuated micro-XYZ stage; bi-directional scratch drive actuator array; chip; fabrication process; free-space micro-optical bench technology; high performance free-space optical systems; monolithically integrated; optical alignment; optical scanning; self-assembled micro-XYZ stages; Actuators; Assembly; Bidirectional control; Integrated optics; Lenses; Micromachining; Microoptics; Optical devices; Optical feedback; Optical sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society Annual Meeting, 1997. LEOS '97 10th Annual Meeting. Conference Proceedings., IEEE

Conference_Location

San Francisco, CA

ISSN

1092-8081

Print_ISBN

0-7803-3895-2

Type

conf

DOI

10.1109/LEOS.1997.630618

Filename

630618