InGaAsP-InP ridge-waveguide DBR lasers with first-order surface gratings fabricated using CAIBE

Author

Lammert, R.M. ; Jones, A.M. ; Youtsey, C.T. ; Hughes, J.S. ; Roh, S.D. ; Adesida, I. ; Coleman, J.J.

Author_Institution

Microelectron. Lab., Illinois Univ., Urbana, IL, USA

Volume

1

fYear

1997

fDate

10-13 Nov 1997

Firstpage

278

Abstract

Generally, the fabrication of distributed Bragg reflector (DBR) and distributed feedback (DFB) lasers requires regrowth over a grating. While fabricating these devices, special measures must be taken in order to preserve the grating during the regrowth. Moreover, surface preparation techniques are needed to remove grating fabrication contamination before regrowth. Utilizing surface gratings to fabricate DBR lasers solves the problem of regrowth. In this work, we employ chemically assisted ion beam etching (CAIBE) to form first-order DBR gratings into a 0.74 μm thick upper cladding structure for an InGaAsP-InP ridge-waveguide (RW) DBR QW laser with a first-order grating

Keywords

III-V semiconductors; diffraction gratings; distributed Bragg reflector lasers; etching; gallium arsenide; gallium compounds; indium compounds; ion beam applications; optical fabrication; quantum well lasers; ridge waveguides; waveguide lasers; 0.74 mum; CAIBE; InGaAsP-InP; InGaAsP-InP ridge-waveguide DBR QW laser; InGaAsP-InP ridge-waveguide DBR lasers; chemically assisted ion beam etching; distributed Bragg reflector lasers; first-order DBR gratings; first-order surface gratings; grating fabrication contamination; regrowth; surface preparation techniques; upper cladding structure; Bragg gratings; Chemical lasers; Distributed Bragg reflectors; Distributed feedback devices; Ion beams; Laser feedback; Optical device fabrication; Pollution measurement; Surface contamination; Surface emitting lasers;

fLanguage

English

Publisher

ieee

Conference_Titel

Lasers and Electro-Optics Society Annual Meeting, 1997. LEOS '97 10th Annual Meeting. Conference Proceedings., IEEE

Conference_Location

San Francisco, CA

ISSN

1092-8081

Print_ISBN

0-7803-3895-2

Type

conf

DOI

10.1109/LEOS.1997.630624

Filename

630624