• DocumentCode
    3171900
  • Title

    Growth of Ge nanoislands on Si (001) using molecular beam epitaxy

  • Author

    Singha, R.K. ; Das, S. ; Das, K. ; Dhar, A. ; Ray, S.K.

  • Author_Institution
    Indian Inst. of Technol. Kharagpur, Kharagpur
  • fYear
    2007
  • fDate
    16-20 Dec. 2007
  • Firstpage
    205
  • Lastpage
    207
  • Abstract
    Self-assembled nano-sized Ge islands have been grown on Si (001) substrates using a solid source molecular beam epitaxy. Detailed island morphological studies at different deposition temperatures and flux rate of as-grown and annealed nanocrystals are reported. Both the alloy composition and in-plane strain in the grown islands have been determined from high-resolution XRD and Raman study. The shape and size of the grown islands and the coarsening mechanism are explicitly discussed with the help of data obtained from AFM topographic images. The current-voltage characteristics of a single isolated island exhibits Coulomb blockade behaviour at room temperature.
  • Keywords
    Coulomb blockade; Raman spectra; X-ray diffraction; annealing; atomic force microscopy; crystal morphology; elemental semiconductors; germanium; island structure; molecular beam epitaxial growth; nanostructured materials; self-assembly; semiconductor epitaxial layers; semiconductor growth; AFM topographic images; Coulomb blockade behaviour; Ge-Si; Raman study; Si; alloy composition; annealed nanocrystals; coarsening mechanism; current-voltage characteristics; high-resolution XRD; in-plane strain; island morphological studies; self-assembled nano-sized islands; solid source molecular beam epitaxy; Annealing; Capacitive sensors; Molecular beam epitaxial growth; Nanocrystals; Self-assembly; Shape memory alloys; Solids; Substrates; Temperature; X-ray scattering; Ge nanoislands; molecular beam epitaxy; self-assembly;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Physics of Semiconductor Devices, 2007. IWPSD 2007. International Workshop on
  • Conference_Location
    Mumbai
  • Print_ISBN
    978-1-4244-1728-5
  • Electronic_ISBN
    978-1-4244-1728-5
  • Type

    conf

  • DOI
    10.1109/IWPSD.2007.4472486
  • Filename
    4472486