Title :
Fabrication of pyroelectric thin film ceramics by tape casting method
Author :
Zhang, S.R. ; Zhong, C.W. ; Liu, R.B. ; Lin, S.W. ; Qu, C.F. ; Yao, C.H. ; Jin, Y.H.
Author_Institution :
Univ. of Electron. Sci. & Technol. of China, Chengdu, China
Abstract :
The purpose of this research is to obtain the sensitive element of infrared (IR) detector directly by tape casting method. The green tapes of pyroelectric ceramic with the thickness of 100-160 μm were cast from the slurry composed of pyroelectric ceramic powder and an appropriate binder-solvent system. The influence of a special “Sandwich” sintering process on the properties of the monolayer thin film pyroelectric ceramic were investigated. As a result smooth thin pyroelectric ceramic sheets with relative high density have been obtained. The dielectric and pyroelectric properties of samples made by tape casting were almost the same as those shaped by dry pressing process. The experiment proves that the tape casting method is a feasible process to make pyroelectric thin film ceramics
Keywords :
casting; ceramics; infrared detectors; lead compounds; niobium compounds; permittivity; piezoelectricity; powder technology; pyroelectric detectors; pyroelectricity; sintering; thin film devices; 100 to 160 mum; 200 mum; IR detector fabrication; PbZrO2-PbNbFeO3-PbTiO3; binder-solvent system; dielectric properties; pyroelectric ceramic powder; pyroelectric properties; pyroelectric thin film ceramics; relative high density; sandwich sintering process; sensitive element; slurry; smooth thin pyroelectric ceramic sheets; tape casting method; Ceramics; Dielectric thin films; Fabrication; Infrared detectors; Powders; Pressing; Pyroelectricity; Slurries; Tape casting; Transistors;
Conference_Titel :
Applications of Ferroelectrics, 1994.ISAF '94., Proceedings of the Ninth IEEE International Symposium on
Conference_Location :
University Park, PA
Print_ISBN :
0-7803-1847-1
DOI :
10.1109/ISAF.1994.522496
