DocumentCode
3172256
Title
Response Surface Methodology for statistical characterization of nano CMOS devices and circuits
Author
Mande, Sudhakar ; Chandorkar, A.N.
Author_Institution
IIT Bombay, Mumbai
fYear
2007
fDate
16-20 Dec. 2007
Firstpage
297
Lastpage
300
Abstract
The accurate prediction of the impact of process variations on circuit performance is very crucial in deciding the parametric yield of integrated circuits. This paper presents the simulation methodology for studying the impact of process variations on device and circuit performance in nanometer regime. In this paper, an empirical model for power and delay of 45 nm node CMOS inverter is build using the well-known response surface methodology. This work also compares the suitability of different response design in terms of model accuracy.
Keywords
CMOS integrated circuits; delay circuits; integrated circuit design; integrated circuit modelling; integrated circuit yield; invertors; nanoelectronics; response surface methodology; semiconductor device models; semiconductor process modelling; statistical analysis; CMOS inverter; delay empirical model; device process variations; integrated circuit parametric yield; nano CMOS devices; response surface methodology; size 45 nm; statistical characterization; CMOS process; CMOS technology; Circuit optimization; Circuit simulation; High K dielectric materials; Implants; MOS devices; Process design; Response surface methodology; Semiconductor device modeling; Process variability; Response Designs; Response Surface;
fLanguage
English
Publisher
ieee
Conference_Titel
Physics of Semiconductor Devices, 2007. IWPSD 2007. International Workshop on
Conference_Location
Mumbai
Print_ISBN
978-1-4244-1728-5
Electronic_ISBN
978-1-4244-1728-5
Type
conf
DOI
10.1109/IWPSD.2007.4472503
Filename
4472503
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