Title :
Fabrication of Passive Wireless Sensor by Pulsed Laser Scribing of Indium Tin Oxide
Author :
Balki, Oguzhan ; Elsayed-Ali, Hani E.
Author_Institution :
Dept. of Electr. & Comput. Eng., Old Dominion Univ., Norfolk, VA, USA
Abstract :
Passive wireless sensors have been studied by many groups as means of sensing chemical and physical properties in inaccessible locations without the need to include a power source at the sensor location. Indium tin oxide (ITO) thin films are attractive for gas sensing. In this work, we show that laser scribing can be effectively used to fabricate an antenna structure from ITO thin films. This structure is suitable for a wireless chemical sensor.
Keywords :
gas sensors; indium compounds; laser beam applications; semiconductor materials; semiconductor thin films; thin film sensors; tin compounds; ITO; antenna structure; gas sensing; passive wireless sensors; pulsed laser scribing; thin films; wireless chemical sensor; Acoustic sensors; Biosensors; Chemical lasers; Chemical sensors; Indium tin oxide; Magnetic sensors; Optical device fabrication; Optical pulses; Transistors; Wireless sensor networks;
Conference_Titel :
New Technologies, Mobility and Security (NTMS), 2009 3rd International Conference on
Conference_Location :
Cairo
Print_ISBN :
978-1-4244-4765-7
DOI :
10.1109/NTMS.2009.5384661
