DocumentCode
3173942
Title
ESD robustness of FDSOI gated diode for ESD network design: Thin or thick BOX?
Author
Benoist, Thomas ; Fenouillet-Beranger, Claire ; Perreau, Pierre ; Buj, Christel ; Galy, Philippe ; Marin-Cudraz, David ; Faynot, Olivier ; Cristoloveanu, Sorin ; Gentil, Pierre
fYear
2010
fDate
11-14 Oct. 2010
Firstpage
1
Lastpage
2
Abstract
The robustness against Electrostatic Discharge (ESD) events of gated diodes, fabricated in CMOS 45nm FDSOI technology, is compared for 10nm and 145nm Buried Oxide (BOX) thickness. It is shown that the performance of devices for co-design on thin BOX is improved thanks to a better thermal dissipation: A gain of 1.6 on the robustness was found.
Keywords
CMOS integrated circuits; electrostatic discharge; silicon-on-insulator; CMOS FDSOI technology; ESD network design; ESD robustness; FDSOI gated diode; buried oxide; electrostatic discharge; gated diodes; thick BOX; thin BOX; Electrostatic discharge; Logic gates; Robustness; Temperature measurement; Transmission line measurements; Voltage measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
SOI Conference (SOI), 2010 IEEE International
Conference_Location
San Diego, CA
ISSN
1078-621x
Print_ISBN
978-1-4244-9130-8
Electronic_ISBN
1078-621x
Type
conf
DOI
10.1109/SOI.2010.5641372
Filename
5641372
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