Title :
Microsystems for chemical and biological sensing
Author :
Büttgenbach, Stephanus
Author_Institution :
Inst. for Microtechnology of the Tech. Univ. of Braunschweig, Braunschweig
Abstract :
The design and performance of exemplary microfluidic components and micro analysis systems enabling real time monitoring of chemical and biological agents will be described.
Keywords :
biosensors; chemical sensors; microsensors; biological sensing; chemical sensing; micro analysis systems; microfluidic components; Biosensors; Chemicals; Fabrication; Integrated circuit technology; Microelectronics; Microfluidics; Micromachining; Monitoring; Performance analysis; Sampling methods; Lab-on-chip technology; biochemical sensing; microfluidics;
Conference_Titel :
Physics of Semiconductor Devices, 2007. IWPSD 2007. International Workshop on
Conference_Location :
Mumbai
Print_ISBN :
978-1-4244-1728-5
Electronic_ISBN :
978-1-4244-1728-5
DOI :
10.1109/IWPSD.2007.4472605
