Title :
Photonic integrated circuits in silicon-on-insulator
Author :
Bogaerts, W. ; Selvaraja, S.K. ; Dumon, P. ; Absil, P. ; Van Thourhout, D. ; Baets, R.
Author_Institution :
Photonic Res. Group, Ghent Univ., Ghent, Belgium
Abstract :
We show a platform for silicon photonic circuits in silicon-on-insulator. In crystalline silicon waveguides have very low propagation losses and at the same time extremely good uniformity, which is essential for high-quality wavelength filters. Also, we can use deposited amorphous material to fabricate similar devices on top of any substrate (including CMOS) with only a small penalty in performance.
Keywords :
amorphous semiconductors; integrated optics; optical waveguide filters; optical waveguides; silicon-on-insulator; CMOS; crystalline silicon waveguides; deposited amorphous material; high-quality wavelength filters; photonic integrated circuits; propagation losses; silicon photonic circuits; silicon-on-insulator; Optical device fabrication; Optical filters; Optical waveguides; Photonics; Resonator filters; Silicon; Wire;
Conference_Titel :
SOI Conference (SOI), 2010 IEEE International
Conference_Location :
San Diego, CA
Print_ISBN :
978-1-4244-9130-8
Electronic_ISBN :
1078-621x
DOI :
10.1109/SOI.2010.5641404
