• DocumentCode
    3174797
  • Title

    Balanced embedded trace substrate design for warpage control

  • Author

    Chia-Ching Chen ; Ming-Ze Lin ; Guo-Cheng Liao ; Yi-Chuan Ding ; Wen-Chi Cheng

  • Author_Institution
    Adv. Semicond. Eng. Group, Kaohsiung, Taiwan
  • fYear
    2015
  • fDate
    26-29 May 2015
  • Firstpage
    193
  • Lastpage
    199
  • Abstract
    Embedded trace substrate is developed to improve both production yield and capability of substrate with fine line and space dimension. This paper presents the solution of substrate design to control warpage. Different embedded trace substrate design factors - solder resist (SR), Cu and prepreg thickness, prepreg property, maskless SR opening and Cu ratio - were led in stress simulation. On account of high modulus of Cu, the simulation results showed the balanced top/bottom copper volume and the selection of high modulus prepreg played important roles to minimize the substrate warpage performance in high temperature. Also, warpage measurement of test vehicles with varying thickness of top and bottom copper layers indicated the substrate design with balance of top and bottom copper volume had the best warpage performance among all test vehicles. Therefore, the embedded trace substrate design with balanced top/bottom Cu volume is optimal for warpage improvement.
  • Keywords
    copper; integrated circuit design; integrated circuit packaging; resists; solders; substrates; Cu; Cu ratio; balanced top-bottom copper volume; copper layers; embedded trace substrate design factors; maskless SR opening; prepreg property; prepreg thickness; production yield; solder resist; stress simulation; substrate warpage performance; warpage measurement; Copper; Etching; Simulation; Stress; Substrates; Temperature; Temperature measurement;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Electronic Components and Technology Conference (ECTC) , 2015 IEEE 65th
  • Conference_Location
    San Diego, CA
  • Type

    conf

  • DOI
    10.1109/ECTC.2015.7159591
  • Filename
    7159591