DocumentCode
3174797
Title
Balanced embedded trace substrate design for warpage control
Author
Chia-Ching Chen ; Ming-Ze Lin ; Guo-Cheng Liao ; Yi-Chuan Ding ; Wen-Chi Cheng
Author_Institution
Adv. Semicond. Eng. Group, Kaohsiung, Taiwan
fYear
2015
fDate
26-29 May 2015
Firstpage
193
Lastpage
199
Abstract
Embedded trace substrate is developed to improve both production yield and capability of substrate with fine line and space dimension. This paper presents the solution of substrate design to control warpage. Different embedded trace substrate design factors - solder resist (SR), Cu and prepreg thickness, prepreg property, maskless SR opening and Cu ratio - were led in stress simulation. On account of high modulus of Cu, the simulation results showed the balanced top/bottom copper volume and the selection of high modulus prepreg played important roles to minimize the substrate warpage performance in high temperature. Also, warpage measurement of test vehicles with varying thickness of top and bottom copper layers indicated the substrate design with balance of top and bottom copper volume had the best warpage performance among all test vehicles. Therefore, the embedded trace substrate design with balanced top/bottom Cu volume is optimal for warpage improvement.
Keywords
copper; integrated circuit design; integrated circuit packaging; resists; solders; substrates; Cu; Cu ratio; balanced top-bottom copper volume; copper layers; embedded trace substrate design factors; maskless SR opening; prepreg property; prepreg thickness; production yield; solder resist; stress simulation; substrate warpage performance; warpage measurement; Copper; Etching; Simulation; Stress; Substrates; Temperature; Temperature measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Electronic Components and Technology Conference (ECTC) , 2015 IEEE 65th
Conference_Location
San Diego, CA
Type
conf
DOI
10.1109/ECTC.2015.7159591
Filename
7159591
Link To Document