DocumentCode
317485
Title
Integral equations for scattering by a particle in a layer
Author
Marx, E.
Author_Institution
Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
Volume
2
fYear
1997
fDate
13-18 July 1997
Firstpage
878
Abstract
In applications such as the alignment of layers in an integrated circuit or the application of a coating to a surface we may need to determine the light scattered by a dielectric or conducting particle of size comparable to the wavelength in a dielectric layer. We apply the method of the single integral equation to solve this problem and find that the minimum number of required unknown surface fields depends on the geometrical configuration of the system. This method involves the definition of auxiliary fields that coincide with physical fields in one region, obey the same equations everywhere, obey the radiation condition, and satisfy certain boundary conditions involving jumps that are the unknown surface functions in the integral equations. We apply this method to particles in layers. We find that for certain configurations the number of unknowns exceeds the number of boundaries. We also estimate the memory requirements for such a three-dimensional problem.
Keywords
coatings; electromagnetic fields; electromagnetic wave scattering; integral equations; integrated circuit technology; light scattering; auxiliary fields; boundary conditions; conducting particle; dielectric layer; dielectric particle; geometrical configuration; integral equations; integrated circuit; layers alignment; light scattering; memory requirements; particle size; physical fields; radiation condition; resonance region; silica layer; single integral equation; surface coating; surface fields; surface functions; three-dimensional problem; wavelength; Application specific integrated circuits; Boundary conditions; Coatings; Dielectrics; Integral equations; Light scattering; Magnetic fields; Maxwell equations; NIST; Particle scattering;
fLanguage
English
Publisher
ieee
Conference_Titel
Antennas and Propagation Society International Symposium, 1997. IEEE., 1997 Digest
Conference_Location
Montreal, Quebec, Canada
Print_ISBN
0-7803-4178-3
Type
conf
DOI
10.1109/APS.1997.631601
Filename
631601
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