• DocumentCode
    317485
  • Title

    Integral equations for scattering by a particle in a layer

  • Author

    Marx, E.

  • Author_Institution
    Nat. Inst. of Stand. & Technol., Gaithersburg, MD, USA
  • Volume
    2
  • fYear
    1997
  • fDate
    13-18 July 1997
  • Firstpage
    878
  • Abstract
    In applications such as the alignment of layers in an integrated circuit or the application of a coating to a surface we may need to determine the light scattered by a dielectric or conducting particle of size comparable to the wavelength in a dielectric layer. We apply the method of the single integral equation to solve this problem and find that the minimum number of required unknown surface fields depends on the geometrical configuration of the system. This method involves the definition of auxiliary fields that coincide with physical fields in one region, obey the same equations everywhere, obey the radiation condition, and satisfy certain boundary conditions involving jumps that are the unknown surface functions in the integral equations. We apply this method to particles in layers. We find that for certain configurations the number of unknowns exceeds the number of boundaries. We also estimate the memory requirements for such a three-dimensional problem.
  • Keywords
    coatings; electromagnetic fields; electromagnetic wave scattering; integral equations; integrated circuit technology; light scattering; auxiliary fields; boundary conditions; conducting particle; dielectric layer; dielectric particle; geometrical configuration; integral equations; integrated circuit; layers alignment; light scattering; memory requirements; particle size; physical fields; radiation condition; resonance region; silica layer; single integral equation; surface coating; surface fields; surface functions; three-dimensional problem; wavelength; Application specific integrated circuits; Boundary conditions; Coatings; Dielectrics; Integral equations; Light scattering; Magnetic fields; Maxwell equations; NIST; Particle scattering;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Antennas and Propagation Society International Symposium, 1997. IEEE., 1997 Digest
  • Conference_Location
    Montreal, Quebec, Canada
  • Print_ISBN
    0-7803-4178-3
  • Type

    conf

  • DOI
    10.1109/APS.1997.631601
  • Filename
    631601