DocumentCode :
3175851
Title :
ICMTS 2001. Proceedings of the 2001 International Conference on Microelectronic Test Structures (Cat. No.01CH37153)
fYear :
2001
fDate :
19-22 March 2001
Abstract :
The following topics were dealt with: matching; parameter extraction; device characterization; RF technology; process charaterization; interconnects; reliability
Keywords :
integrated circuit testing; microelectronic test structures;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Microelectronic Test Structures, 2001. ICMTS 2001. Proceedings of the 2001 International Conference on
Conference_Location :
Kobe, Japan
Print_ISBN :
0-7803-6511-9
Type :
conf
DOI :
10.1109/ICMTS.2001.928626
Filename :
928626
Link To Document :
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